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Observation of competing etches in chemically etched porous silicon

Authors: M. J. Winton; S. D. Russell; R. Gronsky;

Observation of competing etches in chemically etched porous silicon

Abstract

Transmission electron microscopy and scanning electron microscopy offer evidence that the purely chemical HF:HNO3:H2O “stain etch” used to form light-emitting porous silicon is actually composed of competing etches. A localized etch forms the porous nanostructure by propagation of a discrete reaction interface into the silicon substrate. An amorphous surface layer (SiO2) that is a significant by-product of this etch has been observed and is believed to be a primary efficiency-limiting factor in attempts to fabricate chemically etched porous silicon devices. A destructive etch competes for ions in solution and removes both the porous silicon and the amorphous layers from the surface of the specimen when it becomes dominant, eventually quenching the luminescence properties.

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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
16
Average
Top 10%
Average
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