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https://doi.org/10.1063/1.3599...
Article . 1986 . Peer-reviewed
Data sources: Crossref
https://doi.org/10.1364/swcr.1...
Article . 1986 . Peer-reviewed
Data sources: Crossref
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Extreme ultraviolet multilayer reflectors

Authors: Scott, Marion L.; Arendt, Paul N.; Cameron, Bernard J.; Newman, Brian E.; Windt, David; Cash, Wesbster;

Extreme ultraviolet multilayer reflectors

Abstract

We are investigating the design and fabrication of multilayers of various materials to be used as reflectors in the extreme ultraviolet wavelength range. The reflectance versus angle of incidence (10° to 85° from normal) has been measured for a multilayer of silver and silicon at 58.4 nm. We have discovered that contamination layers on the surface of these multilayers can cause significant degradation in their performance. Optical constants for silver from two references were quite different at this wavelength and our measurements have resolved this discrepancy in favor of one of the published values. The absorption coefficient for silicon was found to be somewhat higher than the published value at 58.4 nm. These reflectors could be utilized as polarizing components at this wavelength if the angle of incidence is approximately 40°.

Country
United States
Keywords

Silicon, Design, Silver, Electromagnetic Radiation, Equipment, & Techniques, Reflection, Elements, Mirrors, Fabrication, Extreme Ultraviolet Radiation, Metals, Ultraviolet Radiation 420200* -- Engineering-- Facilities, Radiations, Transition Elements, 42 Engineering, Semimetals

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Average
Top 10%
Average