This paper describes the use of xenon difluoride to clean deposits in the source housing, source turbo pump, and source turbo pump fore‐line of ion implanters. Xenon difluoride has previously been shown to be effective in increasing the lifetime of the ion source1,2 and this paper presents an extension of the technology to other areas within the tool. Process by‐products that are deposited in the source housing, turbo pump, and turbo pump fore‐line can not only pose productivity issues, in the case of coatings on insulators, but can also be flammable and toxic in the case of deposits formed within the turbo pump and fore‐line. The results presented in this paper detail the initial successful examples of using xenon difluoride to clean these deposits.ATMI has shown that xenon difluoride is capable of cleaning an insulator in an ion implanter. Typically during use an insulator will become increasingly coated with deposits that could lead to productivity problems. By introducing xenon difluoride into the sou...