
doi: 10.1063/1.3407516
handle: 20.500.14243/147637 , 20.500.14243/421696 , 11384/1281
A scheme that allows all-electrical high-bandwidth readout of a cantilever deflection by means of an integrated interdigitated transducer is presented. The present approach takes advantage of the piezoelectricity of the chosen cantilever substrate material to generate and detect surface-acoustic-waves by means of an interdigitated transducer (IDT) and to determine cantilever deflections. We shall also show that the same IDT can be used to excite the oscillation modes of the lever. Our scheme is compatible with implementations exploiting wireless excitation and readout and in mass sensing applications.
inter-digitated transducers, mass sensing, atomic force microscopy, Physics, oscillation mode, piezoelectric actuators, SENSOR, Cantilever deflection, surface acoustic waves, cantilevers, structural engineering, high bandwidth, nanocantilevers, transducers, crystallography, substrate material, ATOMIC-FORCE MICROSCOPY
inter-digitated transducers, mass sensing, atomic force microscopy, Physics, oscillation mode, piezoelectric actuators, SENSOR, Cantilever deflection, surface acoustic waves, cantilevers, structural engineering, high bandwidth, nanocantilevers, transducers, crystallography, substrate material, ATOMIC-FORCE MICROSCOPY
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