Portable x-ray fluorescence spectrometer for coating thickness measurement

descriptionPublicationkeyboard_double_arrow_right Article 01 Dec 2007 Belgium English Publisher:AIP PublishingJournal:Review of Scientific Instruments, volume 78 (issn: 0034-6748, eissn: 1089-7623,

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Authors: Carapelle, Alain; Fleury-Frenette, Karl; Collette, Jean-Paul; Garnir, Henri-Pierre; Harlet, Philippe;

doi: 10.1063/1.2822613

pmid: 18163722

handle: 2268/4790

Portable x-ray fluorescence spectrometer for coating thickness measurement

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Abstract

A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1–1500nm in an industrial environment. Accuracy of ∼3% has been achieved in this range with a measurement time of 1min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.

Country

Belgium

Related Organizations

Département de Physique des Particules
France
University of Liège
Belgium

Keywords

Miniaturization, Physique, Physics, Physique, chimie, mathématiques & sciences de la terre, XRF, coating, Reproducibility of Results, Spectrometry, X-Ray Emission, Equipment Design, Sensitivity and Specificity, thickness, Equipment Failure Analysis, Physical, chemical, mathematical & earth Sciences, Coated Materials, Biocompatible, Materials Testing

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