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Imaging of acoustic fields in bulk acoustic-wave thin-film resonators

Authors: H. Safar; R. N. Kleiman; B. P. Barber; P. L. Gammel; J. Pastalan; H. Huggins; L. Fetter; +1 Authors

Imaging of acoustic fields in bulk acoustic-wave thin-film resonators

Abstract

By using an atomic-force-microscope-based technique, we image the vibration of high-frequency, bulk-mode, thin-film resonators. Our experimental technique is capable of monitoring the vibration of these devices over a broad frequency range, from 1 MHz to beyond 10 GHz, allowing us to obtain quantitative measurements of the piezoelectric properties of thin-film materials in that frequency range. This technique allows us to map the complex vibration modes of a new generation of high-frequency bulk piezoelectric resonators, revealing the presence of vibration patterns of very different characteristic lengths.

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    influence
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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
21
Average
Top 1%
Top 10%
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