Powered by OpenAIRE graph
Found an issue? Give us feedback
addClaim

Fabrication of optical fiber probes for nanometer-scale dimensional metrology

Authors: H. M. Marchman; J. E. Griffith; R. W. Filas;

Fabrication of optical fiber probes for nanometer-scale dimensional metrology

Abstract

The fabrication of cylindrical probes having diameters as small as 50 nm is described in this article. The planar endface (advantageously oriented perpendicular to the axis of the cylindrical probe) and sharp 90° corners of the end portion of the probe enable accurate measurement of a feature being scanned, even at sudden jumps in the surface. Conical and flaired probes can also be fabricated with variations of this technique. The fabrication techniques described in this article are simple and inexpensive; only a Teflon beaker, optical fiber, etching solution, polymer solution, fiber cleaver, and optical microscope are necessary.

  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    7
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Average
Top 10%
Average
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!