Spectroscopic ellipsometry with synchrotron radiation

R. L. Johnson; J. Barth; M. Cardona; D. Fuchs; A. M. Bradshaw

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Review of Scientific Instruments

Article . 1989 . Peer-reviewed

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https://dx.doi.org/10.1063/1.1...

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Spectroscopic ellipsometry with synchrotron radiation

descriptionPublicationkeyboard_double_arrow_right Article 01 Jul 1989 English Publisher:AIP PublishingJournal:Review of Scientific Instruments, volume 60, pages 2,209-2,212 (issn: 0034-6748, eissn: 1089-7623,

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Authors: R. L. Johnson; J. Barth; M. Cardona; D. Fuchs; A. M. Bradshaw;

doi: 10.1063/1.1140823

Spectroscopic ellipsometry with synchrotron radiation

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Abstract

The design, construction, and performance of an automatic photometric ellipsometer with rotating analyzer for the VUV region (5–30 eV) is described. The use of a synchrotron radiation source and triple-reflection polarizers makes this new spectral region accessible to spectroscopic ellipsometry. New dielectric function data are presented for InP(110), YBa2Cu3O7, and epitaxial CaF2/Si(111).

Related Organizations

Max Planck Institute for Solid State Research
Germany
Max Planck Society
Germany
Fritz Haber Institute of the Max Planck Society
Germany

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