Fast valve for gas injection into vacuum

descriptionPublicationkeyboard_double_arrow_right Article 01 Jun 1978 English Publisher:AIP PublishingJournal:Review of Scientific Instruments, volume 49, pages 872-873 (issn: 0034-6748, eissn: 1089-7623,

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Authors: A, Fisher; F, Mako; J, Shiloh;

doi: 10.1063/1.1135637

pmid: 18699215

Fast valve for gas injection into vacuum

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Abstract

A simple, fast, reliable magnetically driven gas valve for use in plasma experiments is described. The pressure rise time has been measured to be ∼1 Torr/μs at the valve opening.

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University of California, Irvine
United States

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