Domain inversion in Z-cut LiTaO3 by injecting electrons into negative C face was observed but no domain inversion was observed on injecting electrons on positive C face. At low electron-beam currents, small multidomains are observed. At a scan rate of 2 μm/s and beam current of 100 pA, a domain width of about 6 μm was obtained. We present results of domain width and domain size variation with electron-beam scan rate.