
Scanning Deep Level Transient Spectroscopy (SDLTS) is a current SEM technique for the detection of the local distribution of deep level centres in semiconductors. The contribution deals with the physical foundations of the SDLTS technique and it discusses the demands on the instrumentation. The measurement practice is described and illustrated by several experimental examples. Finally, the possibilities and limitations of SDLTS are critically reviewed.
[PHYS.HIST] Physics [physics]/Physics archives
[PHYS.HIST] Physics [physics]/Physics archives
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