
AbstractA new protocol for fabrication of glass microchips is addressed in this research paper. Initially, the method involves the use of an uncured SU-8 intermediate to seal two glass slides irreversibly as in conventional adhesive bonding-based approaches. Subsequently, an additional step removes the adhesive layer from the channels. This step relies on a selective development to remove the SU-8 only inside the microchannel, generating glass-like surface properties as demonstrated by specific tests. Named sacrificial adhesive layer (SAB), the protocol meets the requirements of an ideal microfabrication technique such as throughput, relatively low cost, feasibility for ultra large-scale integration (ULSI) and high adhesion strength, supporting pressures on the order of 5 MPa. Furthermore, SAB eliminates the use of high temperature, pressure, or potential, enabling the deposition of thin films for electrical or electrochemical experiments. Finally, the SAB protocol is an improvement on SU-8-based bondings described in the literature. Aspects such as substrate/resist adherence, formation of bubbles and thermal stress were effectively solved by using simple and inexpensive alternatives.
Alternative medicine, Biomedical Engineering, Adhesive, FOS: Medical engineering, Oceanography, Article, Visual arts, Fabrication, Layer (electronics), Engineering, Lab-on-a-Chip, FOS: Electrical engineering, electronic engineering, information engineering, Pathology, Nanotechnology, Nanoscale Lithographic Patterning Techniques, Electrical and Electronic Engineering, FOS: Nanotechnology, Electrowetting in Microfluidics and Optics, Geology, FOS: Earth and related environmental sciences, Materials science, Origins and Future of Microfluidics, Microchannel, Anodic bonding, Physical Sciences, Medicine, Microfabrication, Seal (emblem), Substrate (aquarium), Art
Alternative medicine, Biomedical Engineering, Adhesive, FOS: Medical engineering, Oceanography, Article, Visual arts, Fabrication, Layer (electronics), Engineering, Lab-on-a-Chip, FOS: Electrical engineering, electronic engineering, information engineering, Pathology, Nanotechnology, Nanoscale Lithographic Patterning Techniques, Electrical and Electronic Engineering, FOS: Nanotechnology, Electrowetting in Microfluidics and Optics, Geology, FOS: Earth and related environmental sciences, Materials science, Origins and Future of Microfluidics, Microchannel, Anodic bonding, Physical Sciences, Medicine, Microfabrication, Seal (emblem), Substrate (aquarium), Art
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| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 10% | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 10% |
