The synthesis of polysiloxane nanotubes using trifunctional organosilanes is reported. Tubular nanostructures were formed via a chemical vapor deposition technique at room temperature when ethyltrichlorosilane is used or via a liquid phase method when methyltriethoxysilane is used as precursor. In the chemical vapor deposition process the shape of the tubes was controlled by changing the water content in the reaction chamber prior to coating. The diameter varied between 60 and 4000 nm. While in the case of the liquid phase method nanotubes with very high aspect ratios of 800 are produced. Parameters such as length and diameter of the various tubes were investigated using scanning electron microscopy and transmission electron microscopy. Additionally the chemical composition of produced structures was analyzed using attenuated total reflectance infrared and energy dispersive X ray spectroscopy. Glass substrates coated with such structures exhibit extreme superhydrophobic properties.