Abstract A simple acid treatment method was applied to remove the catalyst impurities and other residues contaminated in the vertically aligned carbon nanotube arrays. We demonstrated that acid treatment was an efficient approach for aligned carbon nanotube purification. Scanning electron microscopy and X-ray photoelectron spectroscopy were used to characterize the morphology of the aligned carbon nanotube arrays and to determine the efficiency of the purification. Using hydrochloric acid could efficiently eliminate catalyst impurities and retain the original structures of the aligned carbon nanotube arrays. The method provided a simple, economical, and effective way to purify the aligned carbon nanotubes, and it would promote the applications of vertically aligned carbon nanotube arrays in electronic field.