Nanoscaled interdigitated electrodes (IDEs) are developed for the purpose of being used as miniature and sensitive affinity biosensors. Because of the ease to derivatise its surface, oxidized Ti is chosen as an electrode material on a SiO2 substrate. For proof of principle, oxidized and non-oxidized Ti IDEs are characterised in salt solutions and the immobilisation of glucose oxidase is monitored using impedance spectroscopy. Beside transducer development and demonstration, tailored bio interfaces are a prerequisite for the development of sensitive affinity biosensors. Therefore, a characterisation of immobilisations (based on silanisations) on TiO2 and SiO2 is conducted. For this study, different analytical techniques are identified and evaluated. The use of these techniques will enable a thorough characterisation of immobilisation processes, ultimately leading to miniature and sensitive affinity biosensors.