Abstract A method, which is referred to as the edge reversal method, is proposed for precision measurement of the cutting edge radius of single point diamond tools. An indentation mark of the cutting edge which replicates the cutting edge geometry is firstly made on a soft metal substrate surface. The cutting edge of the diamond tool and its indentation mark, which is regarded as the reversal cutting edge, are then measured by utilizing an atomic force microscopy (AFM), respectively. The cutting edge radius can be accurately evaluated through removing the influence of the AFM probe tip radius, which is comparable to the cutting edge radius, based on the two measured data without characterization of the AFM probe tip radius. The results of measurement experiments and uncertainty analysis are presented to demonstrate the feasibility of the proposed method.