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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Precision Engineerin...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Precision Engineering
Article . 2010 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
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Design and control of a long-traveling nano-positioning stage

Authors: Chien-Hung Liu; Wen-Yuh Jywe; Yeau-Ren Jeng; Tung-Hui Hsu; Yi-tsung Li;

Design and control of a long-traveling nano-positioning stage

Abstract

Abstract In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation–rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed.

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    popularity
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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Powered by OpenAIRE graph
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
71
Top 10%
Top 10%
Top 10%
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