Nanoscale experimental study of a micro-crack in silicon

descriptionPublicationkeyboard_double_arrow_right Article 01 Dec 2008 English Publisher:Elsevier BVJournal:Physica B: Condensed Matter, volume 403, pages 4,202-4,204 (issn: 0921-4526,

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Authors: C.W. Zhao; Y.M. Xing;

doi: 10.1016/j.physb.2008.09.004

Nanoscale experimental study of a micro-crack in silicon

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Abstract

Abstract A micro-crack in silicon was experimentally investigated using high-resolution transmission electron microscopy (HRTEM). The crystal lattice structure of a micro-crack was carefully observed at a HRTEM image scale of approximately 18 nm. The crystal lattice structure of the crack tip region was observed to be regular with good periodicity. The HRTEM images of the micro-crack demonstrate that the micro-crack cleavage expands along two crystal planes, where the principal cleavage plane is the (1 1 1) crystal plane.

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Inner Mongolia University of Technology
China (People's Republic of)

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