
Abstract We propose a dual Lloyd's mirror interferometer with two mutually perpendicular mirrors to fabricate orthogonal crossed gratings through a single exposure. Theoretical analysis shows that in this interferometer the angle between two main periodic directions of the crossed grating is solely determined by the normal directions of the two Lloyd's mirrors and the substrate. To verify this theoretical prediction, four groups of crossed gratings were fabricated. The measurement results agree well with the theoretical relationship.
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