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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Micronarrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
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Article . 2017 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
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Beam broadening in transmission and conventional EBSD

Authors: Katherine P, Rice; Yimeng, Chen; Robert R, Keller; Mark P, Stoykovich;

Beam broadening in transmission and conventional EBSD

Abstract

Transmission electron backscatter diffraction (t-EBSD) has become a routine technique for crystal orientation mapping when ultrahigh resolution is needed and has demonstrated advantages in the characterization of nanoscale and micron-sized samples (Babinsky et al., 2015). In this work, we use experimental measurements and simulations to compare the resolution of the transmission and conventional reflection EBSD techniques across a range of sample volumes and characterization conditions. Monte Carlo simulations of electron trajectories provide the opportunity to estimate beam size and effective resolution, as well as electron flux, as a function of sample thickness or incident beam energy in t-EBSD. Increasing incident beam energy is shown to negatively impact beam diameter in some cases, and the effect of thinning a sample for conventional EBSD is shown to improve characterization resolution but dramatically decrease the number of high-loss electrons backscattered to the detector. In addition to considering spatial resolution when implementing EBSD techniques, it is found that maintaining a high yield of diffracted electrons to the detector is also of critical importance, which is supported by experimental results. Consequently, this work provides key insights into the nature of electron scattering and probe volume for the practical implementation of both transmission and reflection EBSD techniques.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Average
Average
Top 10%
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