Projection lithography onto overall surfaces of cylindrical and conic specimens was investigated to form precise groove patterns on various curved mechanical parts. Fine grooves on shafts or cylinders are required for developing air-bearings, encoders, lubricant supply routes and other micro-systems. Adopting projection lithography instead of laser writing lithography, patterning areas were enlarged, and various groove patterns with pitch and width deviations of +/-2.5% and +/-3.3% were successfully fabricated on overall surfaces of copper shafts and cones. Moreover, pattern pitch accuracy was improved by repeating same exposures with overlaps. High pattern-pitch accuracy of +/-1.5% was obtained using the overlap exposure.