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Journal of Crystal Growth
Article . 2015
License: taverne
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Journal of Crystal Growth
Article . 2015 . Peer-reviewed
License: Elsevier TDM
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Principles of electroless photoetching of non-uniformly doped GaN: Kinetics and defect revealing

Authors: Weyher, J.L.; van Dorp , D.H.; Kelly, J.J.;

Principles of electroless photoetching of non-uniformly doped GaN: Kinetics and defect revealing

Abstract

When using electroless etching of semiconductors for quality control or device applications one must be aware of the possibility of galvanic interaction in the system. Here we show how highly doped (n++) GaN in a bilayer heterostructure dramatically increases the photoetch rate of the low doped (n) GaN layer in alkaline peroxydisulphate solution (the n++ material does not etch). Contacting the bilayer to a platinum sheet in solution further increases the photoetch rate. We show how previous electrochemical studies on GaN can be used to understand such “galvanic” effects. The present results offer an explanation for unexpected features in the photoetching of compound semiconductors which, during growth, become non-uniformly doped either by accident or by design. The work describes an example of the former case: non-uniformity due to the formation of extended defects, e.g. overgrown pinholes in GaN. The relevance of this study for practical applications, including the revealing of crystallographic defects for quality control, is considered.

Country
Netherlands
Keywords

B1.Nitrides, Etching, A1.Crystalstructure, Taverne

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    citations
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    13
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    Top 10%
    influence
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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
13
Top 10%
Average
Average
Green
hybrid