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Radboud Repository
Article . 2005
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Journal of Crystal Growth
Article . 2005 . Peer-reviewed
License: Elsevier TDM
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An electrochemical study of photoetching of heteroepitaxial GaN: kinetics and morphology

Authors: P.K. Larsen; A.P. Grzegorczyk; L. Macht; John J. Kelly; Jan L. Weyher; Jan L. Weyher;

An electrochemical study of photoetching of heteroepitaxial GaN: kinetics and morphology

Abstract

Potentiostatic experiments in KOH solution were used to investigate the photoetching of the Ga-polar face of heteroepitaxial GaN layers grown on sapphire. Different etching regimes are identified; these depend on the applied potential, KOH concentration, light intensity and electron concentration. In particular, the importance of the relative rates of transport of photogenerated holes and OH− ions to the surface for the etching kinetics and morphology is demonstrated. Consequently, the hydrodynamics of the etching system are important. These results form the basis for a comparison with a more widely used approach: photoenhanced open-circuit etching with a counter electrode.

Country
Netherlands
Keywords

Applied Materials Science, International

  • BIP!
    Impact byBIP!
    citations
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    40
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
40
Top 10%
Top 10%
Top 10%
Green
bronze