Abstract FTIR spectra of ozone adsorbed at 77 K on a number of oxide adsorbents were investigated. Special attention was paid to the position and isotopic splitting of the band of ν1+3 combination vibration. For titania eight distinct bands were distinguished and put in correspondence with the bands of ν1 and ν3 vibrations. Chemisorption is accompanied by the frequency increase of the combination band mostly at the expense of decreased anharmonicity. Besides TiO2 and CeO2, ozone chemisorption with the blue shifted ν1+3 band was found for BeO and some cation-exchanged zeolites, while for Al2O3 and ZnO only physisorbed molecules were detected.