Abstract In recent years, influence of gaseous pollutions and pollutants adsorbed on the small particles transferred over the continents and borders may become more serious. Methods used for measuring the pollutants are different and independent for each substance, such as using various physical interactions and chemical reactions. In this study, simple, simultaneous and more quantitative analytical way has been attempted using TOF-SIMS. As a first step of establishing the way of analyses, nitrogen oxides have been set as target substance. Several Cu plates, and pods with Salzmann reagent have been set at different environmental conditions. Afterwards the peaks of TOF-SIMS on the plates have been investigated and compared with results from the chemical measurements. In case of comparing peaks regarding NO 2 , rather more reasonable relationship has been observed.