Abstract In the present paper procedures are described for spray pyrolysis deposition of YSZ films (0.1–30 μm in thickness) with 8 or 15 mole % of YO 1.5 on different substrates. Aqueous or ethylene glycol solutions of Y–Zr-citrates were used as starting material and O 2 as carrier gas. The crystal structure and the morphology of the films were studied. The optimal deposition and post-deposition annealing conditions were defined, taking into account the desired film thickness and characteristics. Substrate temperatures of 250 °C during the deposition followed by heating for 10 min to 400 °C after every spraying and to 590 °C after every three sprayings with final annealing at 590 °C for 2 h in static air atmosphere were found to be suitable for the production of dense, uniform and cracks-free films.