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Scan nonlinearity of a scanning electron microscope

descriptionPublicationkeyboard_double_arrow_right Article 01 Dec 2012Publisher:Springer Science and Business Media LLCJournal:Measurement Techniques, volume 55, pages 1,001-1,004 (issn: 0543-1972, eissn: 1573-8906,

Authors: A. Yu. Kuzin; A. V. Rakov; V. P. Gavrilenko; V. V. Alzoba; P. A. Todua; M. N. Filippov; V. B. Mityukhlyaev;

doi: 10.1007/s11018-012-0089-6

Scan nonlinearity of a scanning electron microscope

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Abstract

The scan nonlinearity of scanning electron microscopes is estimated with the use of a relief element with known geometric form of the profile. The mean value of the step of the test relief structure, which is determined as a test sample is moved along the scanning axis X, is measured. It is experimentally demonstrated that with a 5× magnification, the maximum relative deviation from the mean value of the step of the test structure for a given microscope does not exceed 0.4%.

Related Organizations

Russian Academy of Sciences
Russian Federation
Moscow Institute of Physics and Technology
Russian Federation

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