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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Microsystem Technolo...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Microsystem Technologies
Article . 2001 . Peer-reviewed
License: Springer TDM
Data sources: Crossref
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A MUMPs angular-position and angular-speed sensor with off-chip wireless transmission

Authors: W. Sun; W. J. Li; Y. Xu;

A MUMPs angular-position and angular-speed sensor with off-chip wireless transmission

Abstract

A novel surface-micromachined non-contact high-angular-speed sensor with total surface area under 4 mm2 was developed using the multi-user MEMS processes (MUMPs), and was integrated with a commercial RF transmitter with carrier frequency of 433 MHz for wireless signal detection. This piezoresistive sensing system is capable of wirelessly measuring rotation speeds with sensitivity of ∼2 Hz/rpm/V using 5 V input in the 100–6000 rpm rotation range. Further experimental analyses showed that a sensor designed with a 13 μg seismic mass has high enough sensitivity to detect angular position of a rotating disk if the disk rotation axis is tilted away from the vertical direction. Experimental results from simultaneous detection of angular position and average angular speed for the sensor are reported in this paper.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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