The development of continuously decreasing workpiece tolerances lies in one line with the perspective of nanotechnology. To fulfil metrological demands since about 1982 new high resolution and high precision measuring devices have been developed. These are computerized instruments and the measuring results are very illustrative figures of tested specimens. But the problem of calibration in the nanometric range is still an open question which normally is done only with high uncertainty. New ideas to find a solution for the problem of sufficiently accurate calibrating will make possible that this measurement technique will be used on a broad basis also in industry.