
doi: 10.1007/bf02880082
A modal theory for gratings of deep grooves and arbitrary shape is developed. The theory is implemented with an algorithm of recursion reflection-transmission coefficient matrix (RTCM) . Several cases of plane wave with arbitrary polarization and arbitrary angle of incidence diffracted from gratings of deep grooves and arbitrary profile are calculated . It is found that this method is more accurate, more stable and faster than others.
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