Chemical transport ofβ-Ga2O3 using chlorine as a transporting agent

descriptionPublicationkeyboard_double_arrow_right Article 01 Oct 1986 English Publisher:Springer Science and Business Media LLCJournal:Journal of Materials Science, volume 21, pages 3,430-3,434 (issn: 0022-2461, eissn: 1573-4803,

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Authors: H. Juskowiak; A. Pajaczkowska;

doi: 10.1007/bf02402983 , 10.1007/bf00553781

Chemical transport ofβ-Ga2O3 using chlorine as a transporting agent

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Abstract

The chemical transport of Ga2O3 with chlorine as a transporting agent has been investigated. Thermochemical properties of gallium chlorides have been considered on the basis of literature data. Thermodynamic analysis of transport reactions at 600 to 1500 K has been performed and GaCl3 was found the predominant gallium chloride in the vapour phase. The crystallization temperature of about 1150 to 1250 K proved to be the best conditions for the crystal growth ofβ-Ga2O3.

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