Production of silicon nitride by gas nitridation of ultra-fine silicon powder

descriptionPublicationkeyboard_double_arrow_right Article 01 May 1988 English Publisher:Springer Science and Business Media LLCJournal:Journal of Materials Science, volume 23, pages 1,813-1,816 (issn: 0022-2461, eissn: 1573-4803,

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Authors: K. Ishizaki; S. Yumoto; K. Tanaka;

doi: 10.1007/bf01115725

Production of silicon nitride by gas nitridation of ultra-fine silicon powder

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Abstract

Ultra-fine silicon powder of diameter 20 to 50 nm was gas nitrided at 1373 K. Contamination with air increased the nitriding temperature, which was lower than that found in previous work for larger particle-size powders.

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