Errors in the photometric determination of the standard deviation of a surface profile

descriptionPublicationkeyboard_double_arrow_right Article 01 Apr 1995 English Publisher:Springer Science and Business Media LLCJournal:Measurement Techniques, volume 38, pages 426-429 (issn: 0543-1972, eissn: 1573-8906,

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Authors: N. I. Aleshkevich; Yu. N. Sviridenko; V. V. Syt'ko;

doi: 10.1007/bf00976438

Errors in the photometric determination of the standard deviation of a surface profile

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Abstract

A comparative analysis is presented of the precision parameters of different variants of the photometric method of measuring the standard deviation from surface profiles R{sub q}. A variant by means of which the maximal precision of measuring R{sub q} over a broad range of values is determined.

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