The degree of micro-cracking in BeO-SiC composites due to internal stresses which arise from the mismatch in the coefficients of thermal expansion was monitored by measurements of the thermal diffusivity by the laser-flash technique. The experimental results indicated that micro-cracking was most extensive at approximately 30 and 80 wt% SiC and a minimum at nearly 50 wt% SiC. A theoretical analysis indicated that the magnitude of internal stress increases linearly with SiC content, so that the above observations cannot be attributed to a low internal stress state at ~ 50 wt% SiC. Instead, this effect can be attributed to changes in the statistical variables affecting the brittle fracture as well as the degree of internal stress relaxation. Both these factors are thought to be controlled by the nature of multiaxial stress distribution. At ~ 50 wt% SiC-content, due to anticipated non-hydrostatic triaxial stress distribution, residual stress relaxation is possible in both the components of the composite. However, at low and high fractions of SiC content, such stress relaxation is less likely to occur due to the expected hydrostatic stress distribution in one of the components.