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Part of book or chapter of book . 2001 . Peer-reviewed

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Using the Pull-In Voltage as Voltage Reference

descriptionPublicationkeyboard_double_arrow_right Part of book or chapter of book , Other literature type 01 Jan 2001Publisher:Springer Berlin Heidelberg

Authors: Luís A. Rocha; Edmond Cretu; Reinoud F. Wolffenbuttel;

doi: 10.1007/978-3-642-59497-7_161

Using the Pull-In Voltage as Voltage Reference

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Abstract

The reproducibility of the pull-in voltage of a single side clamped free-standing beam has been investigated for application as a DC voltage reference. A 2 mm long beam has been fabricated in an epipoly process with, at the tip, poly-poly electrodes extending into the axial direction for electrostatic lateral deflection and a comb-drive operating in the normal lateral beam direction. The DC voltage is applied to the electrodes to cause pull-in and the comb drive actuator is used to restore lateral beam position. The device can be operated in feedback or as a seesaw, by using these two sets of electrodes. The reproducibility of the pull-in voltage appears to be mainly limited by charge injection.

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Delft University of Technology
Netherlands

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