
Scanning probe microscopes (SPMs) generate a highly-resolved image of the specimen by scanning its surface with a tiny mechanical, electrical, optical, thermal, or other probe. Often the tip radius of the probe is only a few nm or less. Examples for SPMs are the atomic force microscope (AFM; Sect. 7.1; Binnig et al., 1986), scanning tunneling microscope (STM; Sect. 7.2; Binnig et al., 1982a, 1982b, 1983; Binnig and Rohrer, 1987), scanning near-field optical microscope (SNOM; Sect. 7.3), scanning thermal microscope (SThM; Sect. 7.4), and scanning ion conductance microscope (SICM; Sect. 7.4).
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