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Acoustic Microscopy by Atomic Force Microscopy

Authors: Walter Arnold; Ute Rabe;

Acoustic Microscopy by Atomic Force Microscopy

Abstract

We have constructed an atomic force microscope enabling one to image the topography of a sample, and to monitor simultaneously ultrasonic surface vibrations in the MHz range. For detection of the distribution of the ultrasonic vibration amplitude, a part of the position-sensing light beam reflected from the cantilever is directed to an external knife-edge detector. Acoustic images taken on the surface of a wafer show a lateral resolution of about 100 nm at an ultrasonic frequency of 20 MHz.

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    citations
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    321
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 1%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 1%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
Powered by OpenAIRE graph
Found an issue? Give us feedback
citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
321
Top 1%
Top 1%
Top 10%
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