9‐2: Manufacturing Process for Mass Production of Micro‐LED Displays and High‐Speed and High‐Yield Laser Lift‐Off Systems

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 01 Aug 2020 English Publisher:WileyJournal:SID Symposium Digest of Technical Papers, volume 51, pages 100-103 (issn: 0097-966X, eissn: 2168-0159,

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Authors: Koichi Kajiyama; Yoshikazu Suzuki; Takafumi Hirano; Yoshikatu Yanagawa; Koichiro Fukaya; Naoya Okura; Takeshi Okuno; +1 Authors

doi: 10.1002/sdtp.13814

9‐2: Manufacturing Process for Mass Production of Micro‐LED Displays and High‐Speed and High‐Yield Laser Lift‐Off Systems

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Abstract

In our previous work, we proposed and evaluated processes and equipment to facilitate the mass production of micro LED (light emitting diode) displays. The new technologies include LLO (laser lift off), mass‐transfer, color conversion and backplane with micro Si chip. We quantitatively evaluated them and report results.

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