
The properties of silver impurity levels in silicon are studied. Activation enthalpies of 0.56 eV from the conduction band for the acceptor level and 0.33 eV from the valence band for the donor level are determined using C(U) and DLTS. The directly measured thermal electron capture cross section of the acceptor level equals to σn = 3.0 × 10−16 cm2 and the hole capture cross section of the donor level to σp = 3.1 × 10−16 cm2. Both the cross sections are temperature independent in the measurement range. The entropy factors of the acceptor and donor levels are estimated to be about 15. Es werden die Eigenschaften von Silberstorstellenniveaus in Silizium untersucht. Mittels C(U) und DLTS werden Aktivierungsenthalpien von 0,56 eV unterhalb des Leitungsbandes fur das Akzeptorniveau und 0,33 eV oberhalb des Valenzbandes fur das Donatorniveau ermittelt. Der direkt gemessene thermische Elektroneneinfangquerschnitt des Akzeptorniveaus betragt σn = 3,0 × × 10−16 cm2 und der Lochereinfangquerschnitt des Donatorniveaus σp = 3,1 × 10−16 cm2. Beide Wirkungsquerschnitte sind im gemessenen Bereich temperaturunabhangig. Die Entropiefaktoren des Akzeptor- und Donatorniveaus werden zu etwa 15 bestimmt.
Physics, 530
Physics, 530
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