
Using weak beam electron microscopy the stacking fault energy (SFE) of III-V compounds is determined by measuring the dissociation width of edge dislocations. The SFE corrected for the lattice parameters is given in meV/atom for GaAs, GaP, GaSb, InAs, InP, and InSb. As expected there is a strong correlation of the SFE with the ionicity of the bond. The different plasticity of the compounds is traced back to different dislocation velocities. Mit Weak-Beam-Elektronenmikroskopie wird die Stapelfehlerenergie (SFE) von III-V-Verbindungen durch Messung der Aufspaltungsweite von Stufenversetzungen bestimmt. Die SFE, korrigiert fur die Gitterparameter, wird in meV/Atom angegeben fur GaAs, GaP, GaSb, InAs, InP und InSb. Wie erwartet gibt es eine starke Abhangigkeit der SFE von der Ionizitat der Bindung. Die unterschiedliche Plastizitat der Verbindungen wird auf verschieden grose Versetzungsgeschwindigkeiten zuruckgefuhrt.
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