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Electrical Engineering in Japan
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Electrical Engineering in Japan
Article . 2019 . Peer-reviewed
License: Wiley Online Library User Agreement
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IEEJ Transactions on Sensors and Micromachines
Article . 2018 . Peer-reviewed
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https://dx.doi.org/10.1002/eej...
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Electromagnetic silicon MEMS resonator

descriptionPublicationkeyboard_double_arrow_right Article 01 Aug 2018 English Publisher:WileyJournal:Electrical Engineering in Japan, volume 206, pages 54-60 (issn: 0424-7760, eissn: 1520-6416, Copyright policy )
Authors: Yoshiyuki Watanabe; Toru Yahagi; Yutaka Abe; Hiroki Murayama;

doi: 10.1002/eej.23154 , 10.1541/ieejsmas.138.365

Electromagnetic silicon MEMS resonator

Abstract

AbstractWe have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low‐frequency side as the driving voltage increases. Resonance characteristics due to temperature change and film stress were evaluated.

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    popularity
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
bronze