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Advanced Engineering Materials
Article . 2020 . Peer-reviewed
License: Wiley Online Library User Agreement
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High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating

Authors: Romano L.; Vila-Comamala J.; Jefimovs K.; Stampanoni M.;

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating

Abstract

Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2. The Pt layer is thermally treated to realize a porous catalyst layer that stabilizes the etching of a pattern with a pitch size from 4.8 to 20 μm in the direction perpendicular to the <100> Si substrate and an aspect ratio up to 60:1. The superior etching performance of Pt as a catalyst and its stability in a solution with high HF content are reported in direct comparison with the Au catalyst for the same grating parameters. The Si structure is then used as a template for filling with Au, as a high absorbing X‐ray material. The Pt catalyst layer is used as a conductive seed for Au electroplating. The quality of the overall process is assessed by obtaining a visibility map using 30 μm‐thick Au grating in an X‐ray interferometric setup at 20 keV.

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Keywords

X-ray optics, X-ray imaging, silicon, metal assisted chemical etching

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    influence
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
39
Top 10%
Top 10%
Top 10%
Green
bronze