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Optimization of growing process of silicon bases for production of polycrystalline silicon

Optimization of growing process of silicon bases for production of polycrystalline silicon

Abstract

Influence of terms of growing of silicic bases is considered on education on their surface of epitaksiya layer. The exception of education on the surface of silicic bases of epitaksiya layer is offered by conducting of process of melting in a gas environment at pressure higher atmospheric

Рассмотрено влияние условий выращивания кремниевых основ на образование на их поверхности эпитаксиального слоя. Исключение образования на поверхности кремниевых основ эпитаксиальной пленки предлагается путем проведения процесса плавки в газовой среде при давлении выше атмосферного

Розглянуто вплив умов вирощування кременевих основ на утворення на їх поверхні эпитаксиального шару. Виключення освіти на поверхні кременевих основ епитаксиального шару пропонується шляхом проведення процесу плавки в газовому середовищі при тиску вище атмосферного

Keywords

Полікристалічний кремній, епитаксиальний шар, напруга, газове середовище, індуктор, Polikristallicheskiy silicon, epitaksiya layer, tension, gas environment, inductor, Поликристаллический кремний, эпитаксиальная пленка, напряжение, газовая среда, индуктор, УДК 621.315.592

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold