The evolution of the structural phase states in the Tantalum coatings formed on the NiTi substrate and their change after low energy high-current pulsed electron beam (LEHCPEB) treatment has been investigated by using X-ray diffraction technique. It was found that after LEHCPEB at E=15 J/cm{2} of coated samples alfa-Ta phase of the coating remains. In addition to the B2 phase of the substrate the[beta]-Ta[2]O[5] phase andmartensitephase B19' were detected in the surface layer. The appearance of martensite probably occurred due to the partial dissolution of Ta in TiNi.