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Применение РЭМ для исследования структуры и адгезионных свойств спеченных слоев серебросодержащих паст

Применение РЭМ для исследования структуры и адгезионных свойств спеченных слоев серебросодержащих паст

Abstract

В статье представлены результаты исследования микроструктуры и адгезионных свойств спеченных слоев серебросодержащих паст (СП), применяемых в технологиях производства силовых полупроводниковых приборов для низкотемпературного соединения электрически активной кремниевой структуры (КС), содержащей p-n-переходы, с молибденовым термокомпенсатором (МТ). Микроструктура границ между спеченным слоем СП и металлизированными поверхностями КС и МТ, а также границы между спеченным слоем СП и поверхностью механически отслаиваемой тестовой полосы исследовалась путем анализа РЭМ-изображений, полученных с помощью РЭМ Quanta 200i 3D FEI.The article presents the results of a study of the microstructure and adhesive properties of silver paste sintered layers (SP) used in power semiconductor devices for low-temperature electrically active silicon structure (CS) containing pn-junctions with molybdenum temperature compensator (MT). The microstructure of the boundaries between the sintered layer and the metallized surfaces of the COP and the MT as well as the border between the sintered layer and the surface of mechanically peel test strip was investigated by analyzing the SEM images obtained by SEM Quanta 200i 3D FEI.

Keywords

L-ОТСЛАИВАНИЕ,АДГЕЗИЯ,РАСТРОВАЯ ЭЛЕКТРОННАЯ МИКРОСКОПИЯ,СЕРЕБРОСОДЕРЖАЩАЯ ПАСТА,СИЛОВЫЕ ПОЛУПРОВОДНИКОВЫЕ ПРИБОРЫ,СПЕКАНИЕ

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold