
Проанализированы основные информационные характеристики различных типов микромеханических гироскопов, реализуемых по кремниевой технологии. Основное внимание уделяется стабилизации масштабных коэффициентов преобразования, полосе частот пропускания, линейности и погрешностям преобразования
General data characteristics of the different type of the micromechanical gyroscopes realized on silicon technology are analyzed. Give much attention to stabilization scale factor, frequency band, linearity and errors of transformation.
МИКРОМЕХАНИЧЕСКИЕ ГИРОСКОПЫ,MICROMECHANICAL GYROSCOPES,МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЕ СИСТЕМЫ,MICROELECTROMECHANICAL SYSTEMS
МИКРОМЕХАНИЧЕСКИЕ ГИРОСКОПЫ,MICROMECHANICAL GYROSCOPES,МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЕ СИСТЕМЫ,MICROELECTROMECHANICAL SYSTEMS
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