Powered by OpenAIRE graph
Found an issue? Give us feedback
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/ Ogarev-onlinearrow_drop_down
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/
Ogarev-online
Article . 2014
Data sources: CyberLeninka - Russian open access scientific library
Claim

This Research product is the result of merged Research products in OpenAIRE.

You have already added 0 works in your ORCID record related to the merged Research product.

Исследование структуры многослойных металлических покрытий на кремнии методами РЭМ и СЗМ

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 2014 Russian Publisher:Федеральное государственное бюджетное образовательное учреждение высшего образования «Национальный исследовательский Мордовский государственный университет им. Н. П. Огарёва»Journal:Огарёв-Online (eissn: 2311-2468, Copyright policy )

Исследование структуры многослойных металлических покрытий на кремнии методами РЭМ и СЗМ

Abstract

Методом химического травления, травления фокусированным ионным пучком, растровой электронной микроскопии и сканирующей зондовой микроскопии определена структура и элементный состав многослойных металлических покрытий, используемых в качестве переходного омического интерфейса в контактной системе структур мощных силовых полупроводниковых приборов. Исследуемые металлические покрытия наносились на поверхность кремниевых структур по технологии магнетронного напыления. Полученные результаты демонстрируют эффективность совместного применения методов химического и ионного травления, РЭМ и СЗМ для исследования структуры и элементного состава многослойных металлических покрытий на кремнии.

Keywords

МЕЖЭЛЕМЕНТНЫЕ СОЕДИНЕНИЯ,МНОГОСЛОЙНЫЕ МЕТАЛЛИЧЕСКИЕ ПОКРЫТИЯ,РАСТРОВАЯ ЭЛЕКТРОННАЯ МИКРОСКОПИЯ,СИЛОВЫЕ ПОЛУПРОВОДНИКОВЫЕ ПРИБОРЫ,СКАНИРУЮЩАЯ ЗОНДОВАЯ МИКРОСКОПИЯ,СТРУКТУРА "КРЕМНИЙ НА МОЛИБДЕНЕ"

  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 0
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    		 Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    		 Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold