
TiN.This work investigates the effect of ion bombardment by low-energy Ti ions on the change of surface structure and Ti distribution in depth. It is shown, that the ion bombardment under the chosen operating conditions leads to the Ti condensation on the specimen surface, mainly in the form of drops, and Ti penetrates under the surface no more than by 1 мm. Ti ions are found in deep layers only after TiN coating.
іонне бомбардування, скануюча електронна мікроскопія, мікрорентгеноспектральний аналіз, розподіл елементів по глибині, ионная бомбардировка, сканирующая электронная микроскопия, микрорентгеноспектральный анализ, распределение элементов по глубине
іонне бомбардування, скануюча електронна мікроскопія, мікрорентгеноспектральний аналіз, розподіл елементів по глибині, ионная бомбардировка, сканирующая электронная микроскопия, микрорентгеноспектральный анализ, распределение элементов по глубине
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