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Использование высокоомных кремниевых тензорезисторов для повышения временной стабильности датчиков давления в системах управления и контроля

Использование высокоомных кремниевых тензорезисторов для повышения временной стабильности датчиков давления в системах управления и контроля

Abstract

Показаны причины возникновения временной нестабильности в чувствительных элементах датчиков давлений и предложены методы по ее уменьшению. Предложена конструкция чувствительного элемента датчика давления, основанная на использовании высокоомных монокремниевых тензорезисторов. Проанализированы результаты моделирования схемы температурной компенсации, содержащей высокоомный терморезистор.

The causes of pressure sensor elements long-term unstability are showed. The long-term unstability reduction methods are proposed. the design of a pressure sensor based on the use of high-resistivity silicon strain gauges is proposed. The results of simulation the temperature compensation circuit comprising a high resistance thermistor are analyzed.

Keywords

ВЫСОКОТЕМПЕРАТУРНЫЙ ДАТЧИК ДАВЛЕНИЯ, ВРЕМЕННАЯ СТАБИЛЬНОСТЬ ПАРАМЕТРОВ, ДЕФЕКТЫ ПОЛУПРОВОДНИКА, КНД-СТРУКТУРА, ВЫСОКООМНЫЙ КРЕМНИЙ

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold