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Создание наноразмерного медного покрытия в виде дифракционной линзы на поверхности кварца

Создание наноразмерного медного покрытия в виде дифракционной линзы на поверхности кварца

Abstract

Creation of a diffraction binary lens on the basis of galvanic besieged copper for work in a x-ray range of lengths of waves is described. The relief was formed of a layer of the resist put on an initial copper film, by means of electronic lithograph. Experiments showed presence after manifestation of a resist thin, nonconducting a film current on an initial copper surface. It interferes with further galvanic sedimentation of a continuous layer of copper. Therefore, further researches should be directed on working off of a mode of lithograph for the purpose of study of a layer of a resist for full thickness.

В работе описывается создание дифракционной бинарной линзы на основе гальванически осаждённой меди для работы в рентгеновском диапазоне длин волн. Рельеф формировался из слоя резиста, нанесённого на исходную медную плёнку, с помощью электронной литографии. Эксперименты показали присутствие после проявления резиста тонкой, непроводящей ток плёнки на исходной медной поверхности. Это препятствует дальнейшему гальваническому осаждению сплошного слоя меди. Следовательно, дальнейшие исследования должны быть направлены на отработку режима литографии с целью проработки слоя резиста на полную толщину.

Keywords

ЭЛЕКТРОННО-ЛУЧЕВАЯ ЛИТОГРАФИЯ, ДИФРАКЦИОННАЯ БИНАРНАЯ ЛИНЗА, ЭЛЕКТРОЛИЗ, ПЛАЗМЕННОЕ ТРАВЛЕНИЕ, ГАЛЬВАНОПОКРЫТИЕ

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
gold